Handbook of Vacuum Technology

  • Filename: handbook-of-vacuum-technology.
  • ISBN: 3527407235
  • Release Date: 2008-11-24
  • Number of pages: 1040
  • Author: Karl Jousten
  • Publisher: John Wiley & Sons



A comprehensive standard work and important resource for both students and professionals in research and industry who need detailed knowledge of the theory and applications. Many numerical examples and numerous illustrations visualize the theoretical issues, backed by many useful tables and charts, plus over 500 illustrations. The Handbook discusses the latest developments in vacuum measurement techniques and leak detection in vacuum systems, as well as the connection of vacuum systems to computerized control systems.

Vacuum Technology

  • Filename: vacuum-technology.
  • ISBN: 0854046518
  • Release Date: 2003-01-01
  • Number of pages: 233
  • Author: D. J. Hucknall
  • Publisher: Royal Society of Chemistry



Aimed at newcomers, students and the experienced practitioner, this book is an accessible and applicable guide to quantitative problem solving in vacuum technology.

Vacuum Technology

  • Filename: vacuum-technology.
  • ISBN: 9783540744337
  • Release Date: 2007-12-04
  • Number of pages: 353
  • Author: Nagamitsu Yoshimura
  • Publisher: Springer Science & Business Media



In this book, Yoshimura provides a review of the UHV related development during the last decades. His very broad experience in the design enables him to present us this detailed reference. After a general description how to design UHV systems, he covers all important issue in detail, like pumps, outgasing, Gauges, and Electrodes for high voltages. Thus, this book serves as reference for everybody using UVH in scientific equipment.

Basic Vacuum Technology 2nd edition

  • Filename: basic-vacuum-technology-2nd-edition.
  • ISBN: 0585254915
  • Release Date: 1998-01-01
  • Number of pages: 100
  • Author: A. Chambers
  • Publisher: CRC Press



Vacuum technology is widely used in many manufacturing and developmental processes and its applications grow in scope and sophistication. It is an inter-disciplinary subject, embracing aspects of mechanical, electrical and chemical engineering, chemistry, and materials science while having a broad foundation in physics. In spite of its technological importance, and perhaps because of its cross-disciplinary nature, substantial teaching and training is not widely available. Basic Vacuum Technology aims to give readers a firm foundation of fundamental knowledge about the subject and the ability to apply it. This book is an introductory text on how to use vacuum techniques. It provides a good grounding in the basic scientific principles and concepts that underlie the production and measurement of vacua. The authors describe how these are applied in representative low, medium, high, and ultra-high vacuum systems and explain the most important practical aspects of the operation of a large variety of pumps, components, and measuring instrumentation. The book introduces numerical methods for analysis and prediction of the behavior of vacuum systems in terms of the properties of their individual elements and enables readers to recognize and resolve problems with malfunctioning systems.

Vacuum Technology

  • Filename: vacuum-technology.
  • ISBN: 0444880100
  • Release Date: 1990
  • Number of pages: 554
  • Author: Alexander Roth
  • Publisher: North Holland



This third updated and enlarged edition includes about 350 new papers added to the previous list of references. The contents have been revised and updated in the areas of: Thermonuclear pumping; Throughput; Transmission probability; Electronic circuit simulation; Sorption on charcoal; Desorption from porous materials; Desorption from stainless steel, A1 alloys (outgassing rates); Ion bombardment (glow discharge) cleaning; Clay - type pumps; Turbomolecular pumps-improvements; Cryosorption; NEG (Nonevaporable getter) linear pumps; Standards for measurement of pumping speed (Recommended practice, test domes); Spinning rotor gauges; Quartz friction gauges; Increase of sensitivity of thermocouple gauges; Lubrication in vacuum; Calibration of diffusion leaks; Improvements in leak detection. Besides its role in educational activities, the book will also serve as a handbook for those working in this field, or in fields connected to Vacuum Technology.Comments from the press on the second edition:"A valuable reference work for undergraduate libraries...well organized and clearly written and strikes an appropriate balance between completeness and attention to fundamentals. The index and references are unusually complete. Recommended." (Choice) "Roth's new book contains a comprehensive collection of information on rarefied-gas flow, physical and chemical phenomena associated with vacuum technology, the production and measurement of high vacuum and sealing and leak-detection techniques. One finds a wealth of equations, numerical examples, tables, graphs and monographs. The book is more a handbook than a source book of latest developments. It is suitable for teaching, but the wealth of organized data should also make the book highly useful to engineers..." (Physics Today)

A User s Guide to Vacuum Technology

  • Filename: a-user-s-guide-to-vacuum-technology.
  • ISBN: 9780471467151
  • Release Date: 2005-03-04
  • Number of pages: 536
  • Author: John F. O'Hanlon
  • Publisher: John Wiley & Sons



In the decade and a half since the publication of the Second Edition of A User?s Guide to Vacuum Technology there have been many important advances in the field, including spinning rotor gauges, dry mechanical pumps, magnetically levitated turbo pumps, and ultraclean system designs. These, along with improved cleaning and assembly techniques have made contamination-free manufacturing a reality. Designed to bridge the gap in both knowledge and training between designers and end users of vacuum equipment, the Third Edition offers a practical perspective on today?s vacuum technology. With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, and related coating technologies, A User?s Guide to Vacuum Technology, Third Edition provides a detailed treatment of this important field. While emphasizing the fundamentals and touching on significant topics not adequately covered elsewhere, the text avoids topics not relevant to the typical user.

High Vacuum Technology

  • Filename: high-vacuum-technology.
  • ISBN: 0824798341
  • Release Date: 1997-03-31
  • Number of pages: 568
  • Author: Marsbed H. Hablanian
  • Publisher: CRC Press



Offering a basic understanding of each important topic in vacuum science and technology, this book concentrates on pumping issues, emphasizes the behavior of vacuum pumps and vacuum systems, and explains the relationships between pumps, instrumentation and high-vacuum system performance. The book delineates the technical and theoretical aspects of the subject without getting in too deep. It leads readers through the subtleties of vacuum technology without using a dissertation on mathematics to get them there. An interesting blend of easy-to-understand technician-level information combined with engineering data and formulae, the book provides a non-analytical introduction to high vacuum technology.

Vacuum Engineering Calculations Formulas and Solved Exercises

  • Filename: vacuum-engineering-calculations-formulas-and-solved-exercises.
  • ISBN: 9780323140416
  • Release Date: 2012-12-02
  • Number of pages: 257
  • Author: Armand Berman
  • Publisher: Academic Press



This book was written with two main objectives in mind—to summarize and organize the vast material of vacuum technology in sets of useful formulas, and to provide a collection of worked out exercises showing how to use these formulas for solving technological problems. It is an ideal reference source for those with little time to devote to a full mathematical treatment of the many problems issued in vacuum practice, but who have a working knowledge of the essentials of vacuum technology, elementary physics, and mathematics. This time saving book employs a problem-solving approach throughout, providing the methodology for computing vacuum parameters. References and solved exercises are appended to the end of each chapter. Key Features * Presents the thermal transpiration effect in vacuum gauges with application to capacitance manometers in vacuum metrology * Covers analytical-statistical calculation of conductances of vacuum elements * Examines the molecular flow of gas through short pipes and channels * Explains chocked and nonchocked laminar flow of gas through vacuum elements

Handbook of Vacuum Science and Technology

  • Filename: handbook-of-vacuum-science-and-technology.
  • ISBN: 9780080533759
  • Release Date: 1997-10-29
  • Number of pages: 835
  • Author: Dorothy Hoffman
  • Publisher: Academic Press



The Handbook of Vacuum Technology consists of the latest innovations in vacuum science and technology with a strong orientation towards the vacuum practitioner. It covers many of the new vacuum pumps, materials, equipment, and applications. It also details the design and maintenance of modern vacuum systems. The authors are well known experts in their individual fields with the emphasis on performance, limitations, and applications rather than theory. There aremany useful tables, charts, and figures that will be of use to the practitioner. User oriented with many useful tables, charts, and figures of use to the practitioner Reviews new vacuum materials and equipment Illustrates the design and maintenance of modern vacuum systems Includes well referenced chapters

Vacuum technology

  • Filename: vacuum-technology.
  • ISBN: STANFORD:36105030001320
  • Release Date: 1966
  • Number of pages: 208
  • Author: Institution of Mechanical Engineers (Great Britain). Process Engineering Group
  • Publisher:



Vacuum Technology and Applications

  • Filename: vacuum-technology-and-applications.
  • ISBN: 9781483103334
  • Release Date: 2013-10-22
  • Number of pages: 328
  • Author: David J. Hucknall
  • Publisher: Elsevier



Vacuum Technology and Applications reviews the most commonly encountered methods for the production, containment, and measurement of subatmospheric pressure. This book also outlines a number of very important applications of this technology. This text is organized into eight chapters and begins with a brief survey of the fundamental principles of vacuum technology. The succeeding chapters deal with the pumps used for the production of rough-medium and high-ultra-high vacua. These chapters specifically cover their principles, performance, and applications. These topics are followed by a discussion of the devices for residual gas analysis and partial pressure measurement. Other chapters consider the aspects of leak detection using He-specific mass spectrometer and the materials, components, and fabrication of vacuum devices. The final chapters explore the application of vacuum technology in critical areas of industrial activity, such as thin-film technology, semiconductor, metallurgy, and chemical industry. This book will prove useful to practicing mechanical, chemical, and design engineers.

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